Semiconductor and vacuum equipment

Magnetic systems in semiconductor and vacuum equipment

The SKF Magnetic Systems technology is contamination free and thus is the solution of choice for deep vacuum applications. It is present in more than 120,000 references in operation in the semiconductor manufacturing equipment industry and in the vacuum industry.

SKF introduced the first magnetic bearings for high speed vacuum turbomolecular pumps (TMP) in 1976, to replace lubricated mechanical bearings. The SKF Magnetic Systems technology is today the standard solution that accounts for 85% of the TMPs in semiconductor, glass deposit and instrumentation applications. The SKF Magnetic Systems for TMPs demonstrate exceptional levels of reliability in the harshest applications, high compactness for the best integration in the semiconductor process tools, and low vibration levels for application to electronic microscopes and instrumentation.

Features

  • proven reliability
  • no contamination, as contactless and lubrication free rotation
  • resistance to corrosive gas
  • high speed solution with minimized vibration level thanks to the automatic balancing
  • virtually maintenance free
  • high compactness
  • extremely low losses
  • air inrush and shock proven


SKF also focuses on bringing innovative solutions to equipment OEMs that have been applied to 200mm, 300mm and now 450mm silicon wafer platforms. The SKF Magnetic System is the solution of choice for Rapid Thermal Processing (RTP) and similar equipment, providing rotation and translation control in severe vacuum environments.
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